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National Repository of Grey Literature 1 records found  Search took 0.01 seconds. 
Optical characterization of thin oxide layers
 Statelov, Martin ; Franc, Jan (advisor) ; Moravec, Pavel (referee)
Performance of CdZnTe-based detectors is highly related to the surface quality. Mechanical polishing, chemical etching and passivation are routinely employed for this purpose. The dynamics and properties of CdZnTe surface oxide layers, created by etching-only and passivation by KOH and NH4F/H2O2 solutions, were studied by optical ellipsometry. Effective medium approximation model was used to evaluate ellipsometric spectra. Thickness and formation rate of the surface oxide layers differed in each of the passivation method. Leakage currents were measured simultaneously and were compared with the surface oxide layer properties. NH4F/H2O2 passivation showed to be method with most desirable properties of the surface oxide layer; thick oxide layer and low leakage currents.
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